VAT A-2352575 actuator

VAT A-2352575 actuator

 Introduction

VAT A-2352575 actuator

1. Semiconductor vacuum valve dedicated drive execution unit, driving gate valve opening and closing adjustment

2. High precision of travel control and good repeatability of valve positioning

3. Pneumatic drive structure, quick action response, stable opening and closing timing

4. Built in position feedback sensor, outputting actual valve position signal

5. Metal sealed structure, suitable for high vacuum process chamber working conditions

6. Corrosion resistant material, resistant to slight erosion by process gases

7. Fault safety structure, abnormal gas source can return to the preset safe position

8. Standard interface connector, high compatibility with VAT vacuum valve body

9. Mechanical limit adjustable, limiting the maximum opening and closing stroke of the valve

10. Durable and vibration resistant shell, suitable for semiconductor equipment cabin environment

11. Electrical interface specifications for easy integration into the overall control system

12. Low motion friction loss and long service life of the whole machine

13. Wide temperature working range, adaptable to internal temperature fluctuations of equipment

14. Supports high-frequency reciprocating motion, suitable for continuous operation on the production line

15. Easy disassembly and maintenance, convenient on-site replacement and maintenance of spare parts

The VAT A-2352575 actuator is the core driving component for gas on/off regulation in vacuum valve systems.

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