LAM 853-250063-007 Multi axis Motion Controller

LAM 853-250063-007 Multi axis Motion Controller

 Introduction

LAM 853-250063-007 Multi axis Motion Controller

1. Specially designed for semiconductor equipment, supporting multi axis synchronous linkage control

2. Strong motion interpolation calculation ability and high positioning repeatability accuracy

3. Board type modular structure, compatible with equipment rack slot installation

4. Real time position feedback collection, timely correction of motion deviation

5. Multiple high-speed IO ports, connecting sensors and actuators

6. Anti interference design, adapted to the complex electromagnetic environment of semiconductor workshops

7. Support flexible configuration and debugging of speed and acceleration parameters

8. Fault self check function, quickly identify abnormal status of the shaft body

9. Stable bus communication and smooth data exchange with the host system

10. Support point motion, continuous trajectory, and multiple motion modes

11. Onboard protection circuit, automatic protection against overvoltage and overcurrent

12. Compact board size, saving internal installation space of equipment

13. Firmware compatible with LAM factory process equipment, with good compatibility

14. Long term continuous operation with excellent stability

15. Adapt to motion control application scenarios of wafer processing equipment

The LAM 853-250063-007 multi axis motion controller is the core motion control unit of semiconductor process equipment.

Product imag

ontroller Module

CI868K01-eA 3BSE048845R2 The processor module
PM864AK01-eA 3BSE018161R2 Control module
3BHB003154R0101 GVC707AE01 IGCT module

Other website links

GE WESDAC D20ME处理器模块
GE WES5162-9101电源模块
GE WES5120 5120-1106 数字量输出子模件