MKS GS53-F05F07-HT vacuum pump actuator assembly

MKS GS53-F05F07-HT vacuum pump actuator assembly

 Introduction

MKS GS53-F05F07-HT vacuum pump actuator assembly

1. GS53-F05F07-HT precise control of vacuum pump matching valve opening

2. High temperature resistant HT customized structure, suitable for operation under high temperature and vacuum conditions

3. Quick response action, quickly adjust the vacuum pressure of the chamber

4. Built in overvoltage and overcurrent protection, automatic locking protection for abnormal power supply

5. GS53-F05F07-HT has excellent sealing performance, preventing air leakage in the vacuum chamber

6. Equipped with position feedback signal, real-time transmission of valve opening and closing status

7. Anti workshop electromagnetic interference, stable operation of semiconductor clean room

8. Wear resistant transmission structure, frequent opening and closing are less likely to cause jamming faults

9. Standard installation specifications, can be directly connected to the original vacuum pump body

10. Low power consumption operation, long-term operation with overall low temperature rise

11. Single component failure isolated independently, does not affect the entire vacuum system

12. Support remote signal control, connect to the main control system for automatic adjustment

13. Corrosion resistant material, resistant to a small amount of corrosive gases in the process

14. Equipped with a built-in status indicator light, it quickly identifies operational and fault issues

15. GS53-F05F07-HT can continuously adjust operations 24/7 without interruption

MKS GS53-F05F07-HT vacuum pump actuator has excellent sealing and stability, and is suitable for precision vacuum equipment pressure automatic adjustment and control

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