AMAT 1350-00681 Capacitive Pressure Gauge

AMAT 1350-00681 Capacitive Pressure Gauge

 Introduction

AMAT 1350-00681 Capacitive Pressure Gauge

1. 1350-00681 adopts a capacitive detection structure, with stable and reliable measurement accuracy

2. Built in temperature compensation circuit, the measured value is less likely to drift when the temperature changes

3. Suitable for clean processes of semiconductor machines, the cavity is corrosion-resistant and not easily corroded by process gases

4. No mechanical friction structure, low failure rate and long service life after long-term use

5. 1350-00681 has a fast response speed and can quickly capture small pressure changes

6. The signal output is stable and can be directly connected to the main control system of the equipment to collect data

7. Equipped with overvoltage protection, it can automatically protect the internal sensing diaphragm when the pressure exceeds the limit

8. The overall sealing level is high, preventing gas leakage from affecting the vacuum environment of the machine

9. Excellent seismic performance, measurement data remains stable under equipment vibration during operation

10. Standardized installation interface, suitable for in-situ disassembly and replacement of original equipment

11. Low power operation, minimal heat generation during operation, and will not interfere with the temperature environment of the cavity

12. Internal parameters can be remotely calibrated, and on-site debugging is simple and convenient

13. Anti electromagnetic interference, stable operation in complex electromagnetic environment of workshop

14. Can retain operational monitoring data for later fault tracing and troubleshooting

15. 1350-00681 supports continuous monitoring of operations 24/7 without interruption

AMAT 1350-00681 capacitive pressure gauge has high accuracy and good sealing, specially adapted for real-time pressure detection and control inside semiconductor wafer equipment

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