AMAT 0190-37798 Interlocking Module

AMAT 0190-37798 Interlocking Module

 Introduction

AMAT 0190-37798

1. 0190-37798 is compatible with AMAT semiconductor etching and CVD cavity safety interlock control

2. Collect multiple safety switch signals from the chamber door, gas path, and pressure

3. Trigger an exception and immediately force a shutdown to avoid process safety accidents

4. Optoelectronic isolation circuit, separating strong and weak electricity to prevent signal interference

5. Standard plug-in card structure, easy to plug, disassemble and replace chassis

6. Supporting MKS communication architecture, seamlessly integrated with the main control of the entire machine

7. Multi channel relay contact output, executing locking power-off action

8. The panel indicator light intuitively displays the on/off status of each interlocking circuit

9. Short circuit and overcurrent hardware protection to prevent module from burning out on the spot

10. Industrial materials for clean rooms, suitable for dust-proof and moisture-proof cleanrooms

11. Anti site electromagnetic interference, long-term operation signal without false triggering

12. Equipped with fault memory lock, manual reset and unlocking are required after locking

13. Seismic reinforcement PCB, equipment vibration environment is less prone to virtual soldering and desoldering

14. Original factory exclusive logic program, no need for secondary rewriting to adapt to the entire machine

15. Continuous 24-hour uninterrupted stable operation, strong durability of the production line

AMAT 0190-37798 semiconductor equipment dedicated cavity safety interlock board, fully guarding the operation safety of wafer process equipment.

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