MKS 683B-25580 Digital Exhaust Throttle Valve

MKS 683B-25580 Digital Exhaust Throttle Valve

 Introduction

MKS 683B-25580 Digital Exhaust Throttle Valve

1. MKS 683B-25580 integrated control driver circuit, no need to pair with independent external controller

2. Built in PID intelligent algorithm, fast vacuum pressure regulation, small pressure overshoot

3. Support flexible switching between two working modes: pressure closed-loop and valve plate position

4. Digital communication transmission signal, anti electromagnetic interference, stable data transmission

5. Comes with two programmable alarm points and can be connected to a safety interlock protection circuit

6. Linear adjustment of valve flow rate, with smooth and stable changes in chamber pressure without drastic fluctuations

7. The valve body is made of 316L stainless steel material, suitable for semiconductor clean process gases

8. Flange standard specifications, convenient installation of vacuum pipeline docking, good sealing performance

9. High positioning resolution of valve plate, precise and controllable adjustment of small opening degree

10. The whole machine is dust-proof and compatible with a dust-free workshop, making it less prone to dust accumulation and sticking during long-term operation

11. Can monitor valve opening and operating status online, facilitating daily inspections

12. Internally connected gear drive, sufficient operating torque, smooth and powerful opening and closing

13. Extremely low leakage, excellent pressure holding effect of the chamber under high vacuum conditions

14. Adapt the equipment to the normal operating temperature of the operating temperature zone, and ensure stable performance under high temperature conditions

15. Supports bus docking with the main control of the entire machine, and the entire vacuum system is easily linked together

MKS 683B-25580 is widely used for precise control of exhaust pressure in semiconductor vacuum chambers, with strong process stability.

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