Home > Product > PLC programmable module > FUJIKIN FCSP8202D-4CW2-F139BF39B Mass Flow Controller

FUJIKIN FCSP8202D-4CW2-F139BF39B Mass Flow Controller

1. FUJIKIN FCSP8202D-4CW2-F139BF39B is resistant to gas supply pressure fluctuations and has stable flow control

2. Fast flow response speed, sensitive and quick switching of airflow regulation

3. Installation orientation is not limited, and measurement data is stable when placed arbitrarily

4. Equipped with self checking function for traffic, it can automatically detect and prompt for abnormal operation

5. Compatible with multiple process gases, easy to convert for gas replacement and use

6. Clean and oil-free internal pipelines, suitable for semiconductor high-purity gas working conditions

7. The valve body is tightly sealed, and the air leakage during operation is extremely low

8. Compact body structure, space saving installation inside the air circuit cabinet

9. Stable digital signal transmission and smooth communication with industrial control systems

10. Low particle generation throughout the entire operation, without polluting the clean gas path

11. The working temperature zone is adapted to the regular temperature of the workshop, and has strong adaptability to working conditions

12. High control accuracy, small deviation in gas delivery flow rate, and good repeatability

13. Excellent seismic performance, the connection is not easy to loosen under equipment vibration environment

14. Internal valve components are wear-resistant and have a longer service life due to frequent start stop adjustments

15. Compliant with environmental regulations and compatible with various dust-free process production lines

FUJIKIN FCSP8202D-4CW2-F139BF39B is commonly used for precise flow control of high-purity gases in semiconductor processes.

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