DAIHEN SVD-121-X0834 aligner

DAIHEN SVD-121-X0834 aligner

 Introduction

DAIHEN SVD-121-X0834 aligner

1. Suitable for semiconductor equipment, used for wafer center positioning and notch angle correction

2. High precision servo rotating mechanism with small positioning repetition error

3. Optical sensing detection of wafer edge and notch features

4. Cleanroom specific structure, low dust emission, suitable for wafer processing environment

5. Built in vacuum adsorption platform, stable wafer clamping

6. Integrated driver and signal interface for easy integration with device control

7. High speed alignment operation, shortening the processing cycle of a single chip

8. Equipped with vacuum anomaly and wafer missing detection alarm

9. Seismic resistant body design, suitable for continuous operation under automated conditions

10. Standardized installation dimensions for easy disassembly and replacement of the machine

11. Optimize rotational dynamic balance to reduce wafer slip risk

12. Support multi size wafer adaptation (according to device configuration)

13. Comes with fault code prompts for easy on-site maintenance

14. Signal isolation design to resist electromagnetic interference in the workshop

15. Follow the DAIHEN clean equipment factory inspection standards

The DAIHEN SVD-121-X0834 aligner achieves precise wafer alignment, ensuring the precision of robotic arm handling and process processing.

Product imag

ontroller Module

DO880-1 3BSE028588R1 processor input module
EMG ECU01 ECU01.5 Touch screen
HIMA F7123 processor input module

Other website links

 AI02J 模拟输入模块
 AD02 模拟输入模块
Bentley 125840-02 低压电源模块