INFICON NISEE3110 Controller

INFICON NISEE3110 Controller

 Introduction

INFICON NISEE3110 Controller

1. Suitable for semiconductor vacuum coating equipment, with installation dimensions in accordance with original factory standards

2. High precision thin film rate and thickness monitoring, relying on crystal oscillator sensing to collect data

3. Built in closed-loop regulation logic, precise control of steam source output power

4. Multiple signal input channels, compatible with crystal oscillator probes, pressure, and temperature sensors

5. Equipped with multiple electrical protections to resist device damage caused by surges and static electricity

6. Industrial grade anti-interference circuit, stable response to electromagnetic environment in vacuum chambers

7. Rich communication interfaces that can be integrated with device control systems to achieve data interoperability

8. Capable of storing process formulas and supporting quick retrieval of multiple coating programs

9. Real time running status monitoring, intuitive fault codes for easy troubleshooting

10. Compact body structure, suitable for small installation spaces around vacuum chambers

11. Optimize signal sampling algorithm to reduce process deviation caused by fluctuations

12. Support online parameter modification without stopping or interrupting the coating process

13. Metal dustproof shell, capable of withstanding temperature and humidity conditions in clean workshops

14. Independent circuit design, single channel failure does not affect the continuous operation of the whole machine

15. Complete aging and precision calibration tests according to INFICON's original factory standards

The INFICON NISEE3110 controller, as the core control unit of the coating process, accurately controls the thin film deposition process and ensures the consistency of the semiconductor coating process.

Product imag

ontroller Module

GE 44A751101-G01 Electrical module
TRICONEX 9662-810 base module
TRICONEX 9853-610 base module

Other website links

KOLLMORGEN PC834-001-T 无刷伺服驱动器
GE IOC-555-D压缩机
GE IC670ALG310 电压源模拟输出模块