AMAT 0190-B8982 Power Controller

AMAT 0190-B8982 Power Controller 

Product Details Introduction

AMAT 0190-B8982 Power Controller (SCR Power Controller)

AMAT 0190-B8982 is an SCR power controller specifically designed for Applied Materials (AMAT) semiconductor equipment. It is mostly a customized version of the Control Concepts 3096 series and is used for precision heating/power control. It is commonly used in PVD, etching, diffusion and other process platforms.

core parameters

Model corresponding: AMAT 0190-B8982 (original factory code), with Control Concepts 3096-2002A mostly used at the bottom layer.

Control mode: phase angle/zero crossing trigger, SCR voltage and power regulation.

Input voltage: three-phase 200-480VAC, 50/60Hz.

Rated current: 30A (continuous), suitable for heating loads of 10-15 kW.

Control accuracy: ± 0.5% FS, supports 4-20mA/0-10V analog control.

Communication interface: RS-485 (Modbus RTU), supports remote monitoring and setting.

Feedback mode: Voltage/current/power closed-loop, stable power output and anti fluctuation.

Cooling method: forced air cooling, built-in temperature control fan and overheating protection.

Protection functions: overcurrent, overvoltage, overheating, phase loss, load short circuit, fault self-locking alarm.

Working temperature: 0 ℃ -+55 ℃, suitable for semiconductor cleanroom environment.

Structural specifications: 19 inch 3U rack mounted, standard cabinet installation.

Load adaptation: halogen lamp, quartz lamp, resistance heater, infrared heating tube.

Process adaptation: Heating/ESC power control for platforms such as AMAT P5000, Endura, Producer, etc.

Environmental compliance: RoHS lead-free, compliant with SEMI S2 safety standards.

Reliability: Factory aging test for 72 hours, MTBF>100000 hours.

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