AMAT 0190-25527 RF Generator

AMAT 0190-25527 RF Generator 

Product Details Introduction

AMAT 0190-25527 RF Generator (ENI GHW-12Z)

AMAT 0190-25527 is a 13.56MHz RF generator used in conjunction with Applied Materials (AMAT) semiconductor equipment. The original model is ENI GHW-12Z, which features a stable RF output of 1.25kW and is widely used in plasma processes such as etching and deposition.

Core parameters (15 items)

Model correspondence: AMAT 0190-25527=ENI GHW-12Z, semiconductor specific RF power supply.

Working frequency: 13.56MHz ± 0.005%, industrial plasma standard frequency.

Rated power: 1250W (1.25kW), continuously adjustable from 0 to 1250W.

Input voltage: 480VAC ± 10%, 50/60Hz, three-phase industrial power supply.

Output impedance: 50 Ω, standard matching, suitable for various RF cavity loads.

Power stability: ± 0.5% FS, closed-loop control, resistant to grid fluctuations.

Frequency stability: ± 5ppm, small long-term drift, high process consistency.

Modulation mode: Supports continuous wave (CW) and pulse modulation (1Hz-10kHz).

Cooling method: forced air cooling, intelligent temperature control fan, dust-proof filter, and easy cleaning.

Protection function: overcurrent, overvoltage, overheating, short circuit, and reflection power exceeding (>10%) protection.

Communication interface: RS-232/RS-485, supporting remote monitoring, power setting, and fault diagnosis.

Load adaptation: Compatible with capacitive/inductive plasma loads, with a wide matching range.

Working environment: 0 ℃ -+55 ℃, clean room friendly, resistant to trace corrosive gases.

Structural specifications: 19 inch 3U rack mounted, standard cabinet installation, easy replacement.

Reliability: 72 hour factory aging test, MTBF>80000 hours, compatible with AMAT Endura and Producer platforms.

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