Daihen 3D80-000826-V4 power generator

Daihen 3D80-000826-V4 power generator 

Product Details Introduction

Product Features of Daihen 3D80-000826-V4 Power Generator

Daihen 3D80-000826-V4 is an industrial grade RF power generator, model RGA-10D-V, designed specifically for semiconductor plasma processes, with stable output and strong adaptability. Its core features are as follows:

Standard output frequency of 13.56MHz, rated RF power of 1kW.

Adopting high-frequency conversion technology, the power conversion efficiency is high and the energy consumption is low.

The output stability reaches ± 1%, and the process consistency and repeatability are good.

Built in automatic power matching function, suitable for various load conditions.

Supports pulse output mode, with adjustable pulse frequency from 1Hz to 20kHz.

Equipped with forced air cooling for stable long-term continuous operation.

Equipped with comprehensive protection against overcurrent, overvoltage, overheating, short circuit, etc.

Industrial grade wide temperature design, suitable for environments ranging from -10 ℃ to+50 ℃.

Compatible with TEL original equipment, suitable for semiconductor etching and deposition processes.

Adopting a copper heat dissipation structure, it has fast thermal conductivity and excellent heat dissipation performance.

Integrated digital display panel for intuitive visualization of power and frequency status.

Support remote communication control and adapt to automated production line integration.

Modular structure design, easy installation, and simple maintenance.

Compliant with RoHS environmental standards, lead-free process, and safety compliance.

After 72 hours of aging testing, it has been proven to be reliable and long-lasting in long-term operation.

In summary, the Daihen 3D80-000826-V4 power generator is the preferred equipment for RF power supply due to its high-frequency stable output, complete protection, and strong adaptability, meeting the stringent requirements of semiconductor and industrial plasma processes.

Product imag

ontroller Module

GE 239 motor protection relay
HONEYWELL CC-PUIO31 Input Module
Honeywell FC-PUiO01 Safety System

Other website links

Bently  1701/25 监视器模块
B&R 5AP981.1505-01 自动化面板
GE IC695CPE305LT-ABAD 通信模块