Gasonics 855-2423 Pneumatic Controller Module

Gasonics 855-2423 Pneumatic Controller Module

Product Details Introduction

product name

Gasonics 855-2423 Pneumatic Controller Module

Product application areas

Semiconductor equipment wafer handling system

The module is mainly used for wafer handling robotic arms in Gasonics plasma ashing or etching equipment, controlling their pneumatic execution actions such as grasping, releasing, stretching, and rotating.

Pneumatic valve control system

Pneumatic valve management applied to plasma equipment vacuum chambers, controlling key valve opening and closing actions in processes such as intake, exhaust, and vacuum extraction.

Automatic loading and unloading system

Pneumatic cylinder drive used to control the automated loading and unloading mechanism, achieving safe and efficient movement of wafers between the processing chamber and the wafer loading system.

Gasonics Aura series equipment maintenance and replacement

It is one of the specialized control modules in the Aura 2000, Aura 3010 and other series, widely used in equipment maintenance, replacement and old machine refurbishment projects.

Experimental equipment and modification system control module

Some research institutions or technology experimental platforms use this module for pneumatic control experiments, or integrate it into self-designed wafer processing testing equipment.

Product imag

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