Gasonics A90-027-01 Power Controller

Gasonics A90-027-01 Power Controller

Product Details Introduction

Product Name: Gasonics A90-027-01 Power Controller

Component type: Power Controller Module

Main function: Centralize control, distribution, and protection of multiple power sources in Gasonics plasma processing systems

1、 Power Management System for Plasma Cleaning Equipment

This module is widely used in Gasonics series (such as Aura, L3500, P5000, etc.) plasma cleaning equipment as the internal power control unit of the equipment.

Typical use:

Control the start stop and switching of the main power supply

Allocate stable voltage to various functional modules (such as RF, gas flow control, driver board)

Provide status monitoring and protection for overcurrent, overvoltage, undervoltage, etc

2、 Linkage control of RF power supply and heating system

During plasma processing, the A90-027-01 controller is used to coordinate the power supply relationship between the RF generator and high-power loads such as heating modules.

Control function:

Ensure that the power supply timing of the heater and RF module is correct

Limit surge current during instantaneous startup

Realize power phase switching and fault interlocking

3、 Equipment safety interlock and linkage protection system

The power controller also plays the role of the power supply center for the internal safety interlock system of the equipment, responsible for the sequential activation and abnormal power-off control of the power supply.

Related module control objects:

Load lock elevator control power supply

Power supply for cavity vacuum pump and cooling water system

Security alarm and interlock circuit power supply logic control

Product imag

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