Gasonics A89-004-01 Optical Sensor

Gasonics A89-004-01 Optical Sensor

Product Details Introduction

Product Name: Gasonics A89-004-01 Optical Sensor

Component type: Non contact photoelectric sensor

Main function: Used for automated control tasks such as position detection, motion feedback, and status confirmation in Gasonics plasma processing equipment

1、 Load lock system position detection

This sensor is commonly used for load lock or lifting mechanism position confirmation, to determine whether the wafer tray and lifting platform are in place or have completed the action.

Typical monitoring objects:

Lift plate top/bottom position (such as A90-029-03)

Load lock door open/close status

Wafer in/out of position detection

2、 Chamber door and process compartment safety interlock

A89-004-01 can be used as a safety interlock sensor to ensure that the cabin door or cavity components are in the correct position before starting the plasma process, thereby improving the safety of equipment operation.

Common interlocking points:

Confirmation of process chamber door closure

Reset detection of clamping mechanism inside the cavity

Prevent mishandling or triggering of incorrect actions

3、 Step motion control feedback

In a platform or tray movement system controlled by a stepper driver (such as RD-323M10), this optical sensor can provide an action completion signal for synchronizing logic judgment with the next process trigger.

Typical functions:

Origin reset detection

Action completion flag

Abnormal interruption detection (travel exceeding limit)

Product imag

Related website links

Kollmorgen S72402-NANANA servo amplifier

ASEA 57360001-HG Circuit Board

DSDP170 servo controller

Other website links

CI547 控制器单元模块

CTB810 HN800 转换变压器

ABB UN0942b-P 数字量扩展模块