Gasonics 95-0296 B Touchscreen Display

Gasonics 95-0296 B Touchscreen Display

Product Details Introduction

1、 Product Overview

Gasonics 95-0296 B is a touchscreen display used on Gasonics plasma processing equipment, providing an intuitive human-machine interface (HMI) for device operators. This component combines LCD display and touch operation functions, and can be used for parameter setting, status monitoring, alarm viewing, and device operation. It is one of the core components of the control panel.

2、 Technical parameter description (typical configuration)

Project parameter description

Model 95-0296 B

Type Touch LCD Display Module

Display type: LCD screen (may be grayscale or color)

Operation mode: resistive/capacitive touch screen (depending on the version)

Interface form for communication with the main control board (serial port or dedicated interface)

Installation method: panel embedded installation

Compatible with Gasonics Aura, PEP series and other models

3、 Application scenarios

1. Plasma Asher equipment

Used for controlling equipment operation, parameter adjustment (gas flow rate, RF power, vacuum degree, etc.);

Real time display of process flow, equipment status, and alarm information;

Support local operations and menu navigation.

2. Plasma cleaning and surface activation equipment

Users can set key process parameters such as cleaning time, gas ratio, and plasma density through the touch screen;

Provide program selection and recipe management functions.

3. Load lock system control interface

Display the status of the Load Lock chamber and control the movement of the sample piece up and down;

Realize linkage control with vacuum valves and elevators.

4. Equipment maintenance and fault diagnosis

Display system operation logs, fault codes, and maintenance guidelines;

Support technical personnel for system initialization, testing, and debugging.

Product imag

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