Gasonics 90-1031-01 Interface Board

Gasonics 90-1031-01 Interface Board

Product Details Introduction

The Gasonics 90-1031-01 Interface Board is a key signal relay module in the Gasonics plasma stripping equipment, used to connect the electrical signals between the main control system and various execution/detection sub modules, and achieve functions such as data communication, control signal distribution, and status feedback within the equipment.

1、 Product Overview

The Gasonics 90-1031-01 interface board is a signal interface module designed specifically for the Gasonics series plasma equipment. It is installed on the main control unit or backplane inside the rack and is used for centralized management and transfer of control signals, power signals, or sensor feedback signals. Its function is similar to a "signal router" and it is an important component for interconnecting subsystems within the device.

2、 Main functions

Functional classification description

Signal relay and distribution receive control signals from the main control board or PLC, and distribute them to subsystems such as RF power supply, vacuum pump, heater, gas control, etc

Signal integration consolidates the feedback signals from various sensors (such as temperature, pressure, airflow, etc.) and transmits them to the main controller

Internal integration of optocouplers, resistors, capacitors, and other isolation circuits for electrical isolation enhances the system's anti-interference capability

Interface extension provides multi-channel input/output interfaces, facilitating system function expansion or subsequent upgrades

3、 Application scenarios

The Gasonics 90-1031-01 interface board is widely used in the following application environments:

Main control system of Gasonics plasma stripping machine

Connect the main controller to the RF power supply MFC、 Chamber heater, alarm light, etc

Signal Summary and System Debugging

Provide I/O debugging signal ports for device engineering mode, facilitating quick troubleshooting

Modular system construction

As a modular interface platform, it supports on-demand configuration of functional modules for devices

Product imag

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