Gasonics 95-2736 Power Controller

Gasonics 95-2736 Power Controller

Product Details Introduction

The Gasonics 95-2736 power controller is a specialized power management module used in Gasonics plasma stripping equipment. It is mainly used to control, distribute, monitor, and protect the power supply of key sub modules (such as RF power supply, vacuum pump, heating system, MFC, etc.) inside the plasma system, ensuring the safety and stability of equipment operation.

1、 Product Overview

The Gasonics 95-2736 Power Controller is a core power management unit installed on the internal rack of the Gasonics stripping system, responsible for logical control, circuit breaker protection, status feedback, and process interlocking of the power supply inside the entire machine. Its serial number "95-2736" is the standard part number of Gasonics original factory, widely matched with Aura, L3510, PEP and other series models.

2、 Core functions

Function type description

The main power switch controls the power on/off logic of the entire machine, including manual or automatic control modes

Each subsystem's power distribution controls the supply of power to RF modules, vacuum pumps, gas systems, heating units, etc

Overload protection function detects current overload and abnormal voltage, automatically cuts off power and reports an alarm

The interlocking control mechanism is interlocked with the system status to ensure that, for example, the RF power supply cannot be turned on when the cavity is not evacuated

Real time output of status monitoring and feedback signals such as operation/alarm/circuit breaker for monitoring by the main control board

3、 Application scenarios

The Gasonics 95-2736 power controller is mainly used for:

Power Management Center for Plasma Stripping Equipment

Control the power on sequence and power grouping of the entire machine to ensure that modules start/stop according to specifications

Safety interlock control system in semiconductor technology

Ensure that the RF power supply is automatically interrupted if the reaction chamber is not evacuated or if the temperature is abnormal, to avoid equipment damage

Equipment maintenance and fault diagnosis

Support power status display and diagnostic output, making it easy for technicians to troubleshoot problems

Product imag

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