TEL Tokyo Electron MB3M36-050151-11 Vacuum Gauge

TEL Tokyo Electron MB3M36-050151-11 Vacuum Gauge

Product Details Introduction

Tokyo Electron (TEL) MB3M36-050151-11 Vacuum Gauge - Detailed Explanation of Product Application Fields

1、 Product functional positioning

MB3M36-050151-11 vacuum gauge is a precision instrument used for measuring and monitoring vacuum environmental pressure, widely integrated into Tokyo Electron semiconductor equipment. Its main responsibility is to provide real-time feedback on the pressure status in the vacuum chamber or gas system, ensuring that the process operates under ideal pressure conditions.

2、 Main application areas

1. Vacuum state monitoring of semiconductor manufacturing equipment

Application device type:

Etcher (Etcher)

Chemical vapor deposition equipment (CVD, ALD)

Cleaning system, vacuum load lock, chamber reaction system, etc

Function Description:

Accurate measurement from atmospheric pressure to ultra-high vacuum (10 ⁻⁶ Pa) can be achieved by connecting to the reaction chamber, pre pump, turbo pump inlet, or vacuum pipeline.

2. Core sensors of process vacuum control closed-loop system

Linkage with the system:

Collaborate with vacuum controllers and exhaust systems (such as turbo molecular pumps and dry pumps) to form a closed-loop control loop, achieving automatic pumping, stabilization, and deflation.

Pressure setting threshold trigger:

The pump system can be started/stopped within the set pressure range, or linked to a valve control unit.

Product imag

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