TEL Tokyo Electron 3Z89-000012-11 Power Rack

TEL Tokyo Electron 3Z89-000012-11 Power Rack

Product Details Introduction

Tokyo Electron (TEL) 3Z89-000012-11 Power Rack - Product Application Field Detailed Explanation

1、 Product functional positioning

The 3Z89-000012-11 power rack is a core subsystem used for centralized power supply, distribution, and power module integration in Tokyo Electron semiconductor equipment. It provides a stable and safe power environment for the overall control system, drive module, sensor unit, etc., and has good electromagnetic isolation and modular support capabilities.

2、 Main application areas

1. Power management core of semiconductor manufacturing equipment

Applicable device types:

Lithography machine

Etcher (Etcher)

CVD/PVD thin film deposition system

Wafer cleaning and processing equipment

Main tasks:

Integrate multiple power modules (such as DC, AC/DC conversion, voltage stabilization, etc.)

Provide multiple stable power sources (such as 5V, 12V, 24V, 48V) for output

Support redundant configuration and hot swappable maintenance

2. Multi module power supply platform inside the device

Centralized power supply: providing the required power supply for subsystems such as controllers, interface boards, sensor modules, drivers, etc. in a unified manner;

Multi voltage output: meets the working voltage requirements of different control units and simplifies the wiring structure;

Power allocation and protection: equipped with fuses, current protection, and overvoltage/overheating protection mechanisms to ensure the safe operation of the system.

Product imag

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