Tokyo Electron FPF07P-AC100E Ultrasonic Device

Tokyo Electron FPF07P-AC100E Ultrasonic Device

Product Details Introduction

The Tokyo Electron FPF07P-AC100E Ultrasonic Transformer Unit is a key cleaning component integrated into TEL wet cleaning or developing equipment, mainly used for non-contact, high-precision cleaning of wafer surfaces through ultrasonic cavitation effect. This model is suitable for cleaning processes in the front or middle stages of wafers, which can significantly improve particle removal efficiency and yield.

1、 Basic Product Information

Product Name: Ultrasonic cleaner/Ultrasonic cleaning head

Product model: FPF07P-AC100E

Manufacturer: Tokyo Electron Ltd. (TEL)

Working voltage: AC 100V (inferred from the model)

Applicable location: in modules such as wafer cleaning chamber, developing tank, and delamination tank

2、 Core functions

Efficient particle removal

By high-frequency vibration, tiny cavitation bubbles are formed in the liquid to remove pollutants such as particles, residual glue, and metal ions from the wafer surface;

Effectively used for removing fine particles below 0.1 μ m.

Non contact cleaning

Not causing physical contact with the wafer, suitable for device structures that are extremely sensitive to surface stress in advanced processes (FinFET, EUV).

Support chemical solution cleaning

Can be combined with deionized water (DIW), ozone water SC-1、SC-2、 Dilute hydrofluoric acid and other cleaning solutions for use.

Security control mechanism

Integrated linkage functions such as temperature control, liquid level detection, and power protection;

Support communication with the main device, automatic start stop and alarm feedback.

Product imag

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