Tokyo Electron AQA-K09-TYP2 cooler assembly

Tokyo Electron AQA-K09-TYP2 cooler assembly

Product Details Introduction

The Tokyo Electron AQA-K09-TYP2 Chiller Unit/Cooling Assembly is a key component of the temperature control system used in TEL semiconductor manufacturing equipment. It is mainly responsible for providing precise temperature regulation and heat exchange functions for process modules such as reaction chambers, light sources, electronic components, etc., to ensure process stability and safe equipment operation.

1、 Basic Product Attributes

Product Name: Chiller/Cooler Unit

Product model: AQA-K09-TYP2

Manufacturer: Tokyo Electron Ltd

Module purpose: Liquid or gas temperature control (may be an internal or external cooling module)

2、 Function and Function

Specific description of functional categories

Temperature control management controls the temperature of process modules, electronic systems, or liquid circuits to maintain it within a predetermined stable range

The heat exchange system utilizes circulating fluids such as refrigerant or DIW (deionized water) to remove heat and achieve continuous cooling

Connect the integrated control interface with the main control system of the equipment (such as PLC or temperature controller) to achieve temperature feedback closed-loop control

The process protection function prevents temperature drift from causing equipment overheating, cavity expansion, uneven film thickness, or damage to electrical components

3、 Typical application areas

Application module cooling purpose

Chamber cooling controls the temperature of the reaction chamber wall to avoid particle generation or uneven reaction

RF module cooling maintains stable operation of RF power devices, extending the lifespan of power supply and matching devices

Chemical/developer cooling system stabilizes liquid temperature, controls chemical reaction rate and ensures consistency with wafer surface treatment

The temperature control system of laser/light source components reduces wavelength drift or light intensity fluctuations caused by light source heating, and improves the quality of graphic imaging

4、 Applicable device platform (possible)

This cooler component is suitable for the following devices or their temperature control subsystems:

TEL Clean Track Series (Lithium, ACT8/ACT12)

TEL Trias/Unity series etching equipment

TEL Indy/Tactra series sedimentation equipment

TEL Wet Station series (wet etching or cleaning module)

Product imag

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