TEL Tokyo Electron 2184-020228-12 Analog Input Electronic Module

TEL Tokyo Electron 2184-020228-12 Analog Input Electronic Module

Product Details Introduction

TEL Tokyo Electron 2184-020228-12 Analog Input Electronic Module is a functional electronic module used by Tokyo Electronics Corporation in semiconductor manufacturing equipment. It is specifically designed to collect analog signals (Analog Input) from internal sensors or process control systems of the equipment, and convert them into a standard signal format that can be processed by the main control system. It is a key link in the control chain of wafer manufacturing equipment.

1、 Basic Product Information

Project Content

Product Name Analog Input Electronic Module

Model 2184-020228-12

Tokyo Electron Semiconductor Equipment System

Function type: Analog signal acquisition and input interface

2、 Main functions

Analog signal acquisition

Receive continuous analog electrical signals (such as 0-5V, 0-10V, 4-20mA, etc.) from temperature sensors, pressure sensors, gas flow meters, position feedback devices, and other equipment;

The module has an A/D conversion function inside, which digitizes analog signals for further processing by the control system.

Signal isolation and stable input

Capable of electrical isolation, effectively avoiding external signal interference affecting the main control system;

Improve the overall noise resistance and operational stability of the system.

Data upload and process control support

Upload the collected parameters in real-time to the main control unit for closed-loop control logic;

It can be used for dynamic process adjustment of linked actuators, such as temperature control feedback, flow regulation, etc.

3、 Application Fields

Semiconductor front-end process equipment

Applied to TEL wafer manufacturing equipment such as coating and developing equipment (Clean Track), etching machines (Etcher), cleaning equipment, etc;

Collect key process variables for real-time monitoring and control.

Environmental parameter collection system

Installed in equipment parts such as vacuum chambers, heating platforms, gas supply units, etc;

Real time collection of analog information such as temperature, pressure, and gas flow rate.

Equipment maintenance and diagnosis

Engineers can obtain detailed process parameters through this module for equipment diagnosis and debugging;

When the module is damaged or aged, it can be replaced to restore the signal link function.

Product imag

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