TEL Tokyo Electron 3R81-000037-1 Single Board Computer

TEL Tokyo Electron 3R81-000037-1 Single Board Computer

Product Details Introduction

Product Name: 3R81-000037-1 Single Board Computer (SBC)

Manufacturer: Tokyo Electron Ltd

Product Type: Industrial Single Board Computer (Industrial Control Core Board)

1、 Product Overview

3R81-000037-1 is an industrial grade embedded single board computer (SBC) used in Tokyo Electron (TEL) semiconductor equipment to perform tasks such as local logic control, device data processing, and human-computer interaction interface drivers. It is one of the core processing units of the equipment control system.

2、 Core functions

Local processing and control

Run embedded operating systems (such as embedded Linux or VxWorks) or real-time control programs to execute process control logic.

Multiple communication interfaces

Provide multiple communication interfaces such as serial port (RS-232/485), USB, Ethernet, TTL, GPIO, etc., for connecting with PLCs, I/O boards, actuators, or sensors.

Equipment data collection and computation

Collect and process data from on-site equipment (such as temperature, vacuum, flow rate, position) to adjust or record process parameters.

System Management and Diagnosis

Support self checking function, abnormal log recording, and status LED indication, which helps with fault location and maintenance.

3、 Typical application scope

3R81-000037-1 single board computer is suitable for serving as the control core role in the following equipment systems of Tokyo Electron:

Etcher main control unit

CVD/PVD thin film deposition system main control processing board

Wafer transfer system, alignment system

Vacuum control subsystem

Data Collection and Feedback Processing Module in Coater/Developer

Product imag

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