TEL Tokyo Electron 3D81-000020-14 Printed Circuit Board

TEL Tokyo Electron 3D81-000020-14 Printed Circuit Board

Product Details Introduction

TEL Tokyo Electron 3D81-000020-14 Printed Circuit Board (PCB) is a specialized electronic control board used in semiconductor manufacturing equipment. This circuit board mainly undertakes tasks such as signal processing, device control, data communication, or interface relay, and plays an important role in various core equipment systems of TEL.

1、 Basic Information

Product Name: Printed Circuit Board/Control Board

Product model: 3D81-000020-14

Manufacturer: Tokyo Electron Ltd. (TEL)

Function type: Control, Communication, or Interface Processing PCB

Application location: Embedded in the main control system, electrical cabinet or subsystem interface unit of TEL equipment

2、 Core functions (depending on specific configuration)

Signal conditioning and processing

Perform front-end processing such as sampling, amplification, and filtering on input signals (analog/digital).

Interface relay

Perform signal relay and protocol conversion between the main controller, actuators, and sensors.

Control logic execution

Implement the logical functions of some control units in the device, such as gas switching control, valve control, mechanical action triggering, etc.

Communication Management

Manage data communication between the main control PLC, upper computer, and other modules, which may integrate serial ports, Ethernet, or dedicated buses.

3、 Typical application devices

This circuit board is suitable for various TEL devices, and common usage environments include:

Etch (dry etching equipment)

Control subsystems such as RF matching device, plasma source, and vacuum valve status feedback.

CVD/ALD (Chemical Vapor Deposition) equipment

Manage chemical source switches, temperature control circuits, chamber protection devices, etc.

Coater/Developer (photoresist coating development system)

Control the actuators such as the rotary table, heating unit, and developer pump.

Wafer Transfer Systems

Connect the robot controller, position sensor, and vacuum suction cup control system.

Product imag

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