TEL Tokyo Electron 3281-000146-12 Driver Module

TEL Tokyo Electron 3281-000146-12 Driver Module

Product Details Introduction

1、 Basic Information

Product model: 3281-000146-12

Product Name: Driver Module

Manufacturer: Tokyo Electron (TEL)

Module category: actuator driver module

Version number: 12th edition (specific revised version)

2、 Main functions

Motor drive: provides control signals and driving force for stepper motors, servo motors, or other actuators

Execution action control: Control the start, stop, speed, and position of the mechanical action of the equipment according to the main control instructions

Signal processing: Processing feedback signals to achieve closed-loop control

Protection function: overcurrent, overvoltage, overheating and other protections to ensure the safety of modules and equipment

3、 Typical application areas

Drive of robotic arms and conveyor mechanisms in semiconductor manufacturing equipment

Rotating platform drive in coating and developing equipment

Gas flow valve or vacuum pump drive inside etching equipment

Execution units for handling systems, lifting platforms, positioning devices, etc

4、 Module features

Highly integrated design, suitable for complex process equipment requirements

Supports multiple control protocols and is compatible with TEL device control architecture

Industrial grade stability, suitable for clean room environment

Version "-12" indicates hardware or firmware upgrade to ensure optimal performance

Product imag

Related website links

GE IS210BPPBH2BMD Controller Module

KOLLMORGEN CP310250 PRD-P310250Z-55 serv

IS420PUAAH1A Ethernet Switch

Other website links

ABB GVC707AE01励磁IGCT可控硅

1TGE120011R1001 机器人驱动电源模块

ABB 3DDE300410 显示器模块