TEL Tokyo Electron MPC-T0070A-14 Digital Input Module

TEL Tokyo Electron MPC-T0070A-14 Digital Input Module

Product Details Introduction

1、 Basic Information

Product model: MPC-T0070A-14

Product Name: Digital Input Module

Manufacturer: Tokyo Electron Limited (TEL)

Module category: Industrial control I/O interface board (input specific)

Version number: -14 represents the 14th hardware revision version of the module, adapted to specific devices or system platforms

2、 Main functions

This module is used to collect digital signals on site and provide critical status feedback for the equipment control system

Function item description

Status signals (such as on/off) of buttons, limit switches, proximity sensors, etc. in switch quantity acquisition devices

Real time monitoring system for binary status information such as door status, safety lock, mechanical position, etc

The signal isolation module comes with an optocoupler or electronic isolation design to prevent external interference from being transmitted into the main control system

Input filtering is used to filter mechanical jitter or transient interference, improving signal stability and accuracy

The system communication encodes the input signal and sends it to the upper control system through the bus protocol

3、 Typical application scenarios

This module is widely used as a front-end unit for state detection in various semiconductor devices of TEL, such as:

ACT series lithography pre-processing equipment

Detect the status of the wafer stage, pneumatic door switch, wafer in position signal, etc

Tactras series etching system

Collect chamber door lock opening and closing, vacuum status detection switch, and fault signal feedback

Trias series sedimentary system

Detecting the mechanical motion status of the furnace body, gas on/off feedback, cooling channel feedback signals, etc

Product imag

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