TEL Tokyo Electron 2981-600550-11 Input/Output Module

TEL Tokyo Electron 2981-600550-11 Input/Output Module

Product Details Introduction

1、 Basic Information

Product model: 2981-600550-11

Product Name: I/O Module

Manufacturer: TEL - Tokyo Electron Limited

Module category: Digital/Analog Input/Output Board, commonly used for internal signal control systems of equipment

Revised version: 11 (representing the 11th edition, applicable to specific hardware or firmware versions)

2、 Main functions

Function Classification Function Description

Digital inputs receive external signals such as sensors, buttons, proximity switches, and other status feedback.

Digital output sends on/off control signals to device actuators, such as relays, solenoid valves, lights, etc.

The analog interface may support the acquisition and output of some analog signals (such as temperature, pressure, voltage, etc.) (if configured with analog channels).

Signal relay/isolation realizes electrical isolation and signal amplification between the upper control system and the underlying equipment.

High speed data exchange between modules and the main control board or PLC, supporting TEL dedicated communication protocol.

3、 Typical application areas

This module is widely used in multiple subsystems of TEL semiconductor equipment, mainly including:

Coater/Developer system

Control the developing pump, heating station, exhaust fan, liquid valve, vacuum module, etc.

Etcher system

Monitor the gas status of the chamber, control the flow switching valve, high-frequency power status, chamber door, etc.

CVD/ALD thin film deposition equipment

Manage temperature control system, vacuum pressure monitoring, gas switching, plasma start signal, etc.

Handling and Vacuum Interface System

Used to detect the opening and closing of the chamber door, the position of the lifting platform, the status of the robotic arm, and other signal feedback.

Product imag

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