TEL Tokyo Electron 2981-600409-11 Relay Board

TEL Tokyo Electron 2981-600409-11 Relay Board

Product Details Introduction

TEL Tokyo Electron 2981-600409-11 Relay Board

Type: Relay Control Module/Relay Control PCB

Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview

This relay board is used in TEL semiconductor equipment and is an important intermediate control module in the control system to achieve electrical signal switching, power drive, and equipment status interlocking. It is mainly responsible for the following functions:

Control high current loads such as solenoid valves, heaters, motors, pumps, etc

As an electrical interface between digital signals (from the main control or PLC) and actuators

Implement on-off control, state switching, safety interlocking, sequential logic execution, etc

Support remote logic drive and local mechanical relay protection functions

2、 Typical application areas

1. Gas delivery and valve control system

Control gas on/off, solenoid valve group on/off (such as N2, Ar, SiH ₄, etc.)

Linkage with MFC module, open and close according to the process flow

2. Vacuum pump and vacuum chamber

Control the vacuum pump, electromagnetic vent valve, and vacuum valve execution unit

Combining sensors to achieve automatic switching control of vacuum state

3. Temperature control and heating system

Control heating power supply, electric heating element, hot plate or cooling fan, etc

Provide relay on-off logic with delay protection

4. Wafer handling and transportation

Control the load port and the power supply circuit for the action of the robotic arm

Used for starting/stopping positioning systems, platform lifting, etc

3、 Technical characteristics (based on TEL relay board design standards)

Multi channel relay output (commonly 8/16 channels, NO/NC contacts can be set)

Equipped with LED status indicator light for easy maintenance and on-site diagnosis

Connect to the main control board or I/O interface board through cables and connectors

Can withstand high load currents and support AC or DC drive

Equipped with electrical protection functions such as circuit breaker, slow start, and interference suppression

Product imag

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