TEL Tokyo Electron 1B80-002395-11 Area Board

TEL Tokyo Electron 1B80-002395-11 Area Board

Product Details Introduction

TEL Tokyo Electron 1B80-002395-11 Area Board

Type: Electronic Area Control Board/Area Board/Zone Interface Board

Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview

This zone board is a printed circuit board module used for zone management and control within TEL semiconductor equipment. It is responsible for coordinating the signal input and output, power control, sensor data aggregation, and other functions of one or more "zones" in the equipment. It is commonly used in multi cavity or multi unit systems.

The main functions include:

Manage control signals for specific areas (such as a cavity, heating unit, transmission path)

Integrated sensor input, actuator control, valve control, temperature or pressure feedback

Implement interface relay between the main control board, I/O board, and driver board

Provide localized power distribution and signal isolation to improve system stability and maintainability

2、 Typical application areas

1. Thin film deposition equipment such as CVD and ALD

Control heaters, MFCs (Mass Flow Controllers), vacuum valves, etc. inside specific chambers

Regional control of process parameters such as gas ratio, temperature distribution, pressure, etc

2. Plasma etching equipment (Etcher)

Provide high-frequency power interface, safety interlock, and sensor feedback channel for a certain area

Realize multi cavity collaborative work control

3. Wafer handling system (Loadlock/Transfer Arm area)

Control the lifting platform, vacuum pump, position sensor, door lock drive, etc

Realize precise signal transmission and logical judgment for inter regional linkage

4. Independent electrical control management of system submodules

Divide complex equipment into several "zones", with each zone board independently managing signals and controls within its own area

Support modular maintenance and replacement for quick diagnosis and repair

Product imag

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