TEL Tokyo Electron 1B80-002392-11 Interface Board

TEL Tokyo Electron 1B80-002392-11 Interface Board

Product Details Introduction

Product Name: TEL Tokyo Electron 1B80-002392-11 Interface Board

Category: Electronic Interface Module/Interface Board

Manufacturer: Tokyo Electron Limited (TEL)

1、 Product Function Overview

TEL interface boards are commonly used in semiconductor manufacturing equipment as core modules for signal exchange, communication bridging, and system collaborative control. They mainly achieve the following functions:

Provide electrical connections between the control unit and the actuator

Convert and relay signals from sensors, actuators, or external subsystems

Format conversion, buffering, or logical judgment of signals

As part of system interlocking, error detection, and linkage control

2、 Typical application areas

1. Thin film deposition equipment (CVD/ALD/PVD)

Used for data and control signal transmission between gas flow control units (MFCs), heating platforms, valve actuators, and main control systems.

2. Plasma Etcher

Connect RF power supply, vacuum chamber controller, temperature controller and main control module;

Implement the transmission, reception, and control of process monitoring signals.

3. Wafer Cleaners

Connect spray devices, liquid valve groups, electric actuators, etc;

Realize multi-channel sensing and control.

4. Wafer Transfer Module

Coordinate the communication between the robotic arm, position sensor, motor driver, and control system;

Ensure high-precision transmission of wafers in a vacuum environment.

5. Lithography and Exposure Equipment

Manage the signal transmission between the exposure head, electric focusing platform, UV source, and control system;

Provide stable interface logic.

Product imag

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