TEL Tokyo Electron 2L51-000013-V1 Thermal Plate

TEL Tokyo Electron 2L51-000013-V1 Thermal Plate

Product Details Introduction

Product model: 2L51-000013-V1

Product Name: Thermo Board

Manufacturer: Tokyo Electron Ltd

1、 Product Features

This heat plate is used for temperature monitoring and heat control in semiconductor manufacturing equipment, and its main functions include:

Receive signals from thermocouples or fiber optic temperature sensors and convert them into temperature data that can be processed by the control system.

Control the start stop and power regulation of the heater to ensure precise control of the process temperature.

Responsible for temperature management during batch heat treatment and baking processes to ensure process stability.

2、 Typical application areas

300mm wafer heat treatment equipment, such as TELINDY and FORMULA series.

Temperature control module in semiconductor cleaning and drying system.

Other semiconductor manufacturing process equipment that requires precise temperature control.

3、 Product Features

Support multi-channel temperature acquisition and heat management.

Used in conjunction with high-precision sensors such as fiber optic temperature sensors.

Design to adapt to the clean room environment of semiconductor manufacturing.

Modular design for easy maintenance and replacement.

Product imag

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