TEL Tokyo Electron 2L81-050133-V1 timing board

TEL Tokyo Electron 2L81-050133-V1 timing board

Product Details Introduction

Product Name: 2L81-050133-V1

Alias: TAB35F-1/HTIL Timing Control Board

Manufacturer: Tokyo Electron Ltd

Product type: Timer Board

1、 Product Function Description

This module is a timing circuit board used to control process timing, mainly realizing time management and logic control of the action process in the equipment. Its functions include:

Time control logic

Delay start and stop of control operations (such as valve opening and closing, gas release, vacuuming, heating, etc.)

Equipment safety interlock

Implement start stop linkage between modules to ensure safe operation of equipment according to preset logic and avoid misoperation

Process rhythm management

Support precise timing of each step in the process flow, used for step-by-step processes or multi-stage control systems

2、 Application Fields

This timing board is mainly used in Tokyo Electron semiconductor manufacturing equipment, with typical application devices as follows:

CVD (Chemical Vapor Deposition) equipment

Control gas on/off, heating time, cooling time and other stage actions

Etch equipment

Control the vacuum establishment, plasma startup, and shutdown rhythm of the process chamber

Cleaning equipment (such as ACT series)

Control the switching time points in the flow of water, gas, and dry air

Replacement parts for time relay module in the back control cabinet

Used to replace traditional physical time relays and achieve digital timing control

3、 Technical characteristics (may include)

Multi channel time control function

Potentiometer or jumper for setting/adjusting delay parameters

Onboard timing components such as relays, capacitors, resistors, etc

Standardized interface design, compatible with TEL control framework

Product imag

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