TEL Tokyo Electron 3281-000137-11 Interface Board
Product Details Introduction
Product Name: TEL Tokyo Electron 3281-000137-11 Interface Board
Basic function: As a bridge for connecting and converting internal signals of the device, responsible for transmitting signals from the controller to the executing components and transmitting feedback signals back to the control system.
Signal type: Supports digital input/output, analog signal transmission, and some communication interfaces to meet various control requirements.
Application environment: Widely used in subsystems such as gas control, vacuum systems, temperature regulation, and mechanical control in semiconductor manufacturing equipment.
Structural features: Modular design, easy to disassemble and maintain, with good resistance to electromagnetic interference and stability.
Interface form: Standard industrial connectors and terminals are used for easy connection with other control modules and sensors.
Protection function: It has certain electrical protection measures, such as overcurrent protection and signal isolation, to ensure the safety and reliability of the system.
Installation location: Usually installed inside the equipment control cabinet, close to the relevant control module or execution unit.
Applicable equipment: Compatible with multiple TEL wafer processing equipment, including CVD, Etch, cleaning and handling systems, etc.
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