Novellus Systems 03-287865-00 Controller Module

Novellus Systems 03-287865-00 Controller Module

Product Details Introduction

The Novellus Systems 03-287865-00 controller module is one of the core control components in Novellus semiconductor equipment, mainly responsible for the automation instruction execution, signal coordination, and operation monitoring of various internal process flows of the equipment. It is usually installed in the equipment main control architecture as the data and control center between the execution module, sensors, power board, and interlocking system.

The application areas of Novellus Systems 03-287865-00 controller module products are as follows:

Core process control of equipment

Used in semiconductor manufacturing equipment such as CVD, PVD, ALD, to achieve automatic control of deposition, heating, gas flow, vacuum and other processes.

Multi signal management and coordination

Manage data exchange between multiple sensors and actuators, including temperature, pressure, flow rate, voltage, motor status, etc.

System interlocking logic processing

Cooperate with the interlocking module to determine in real-time whether the equipment meets the operating conditions and ensure operational safety.

Control instruction execution center

Receive process parameters and control instructions issued by the upper system or human-machine interface (HMI), and allocate them to each submodule.

Collaborate with I/O modules and communication interfaces

By collaborating with I/O boards and communication adapters, high-speed data exchange and process control loops between device modules can be achieved.

Suitable for multiple models of Novellus device platforms

Commonly used in Concept series, ALTUS series, INOVA platform, etc. as the core control processing unit.

System fault detection and self diagnosis function

Capable of monitoring its own operating status and providing feedback on abnormal or alarm signals for troubleshooting.

High reliability industrial application scenarios

The module is designed with high anti-interference and high stability, suitable for long-term operation in clean room environments.

Product imag

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