Home > Product > Robot control system > Novellus Systems 19-00130-00 Input/Output Module

  • Novellus Systems 19-00130-00 Input/Output Module
  • Novellus Systems 19-00130-00 Input/Output Module
  • Novellus Systems 19-00130-00 Input/Output Module
Novellus Systems 19-00130-00 Input/Output Module Novellus Systems 19-00130-00 Input/Output Module Novellus Systems 19-00130-00 Input/Output Module

Novellus Systems 19-00130-00 Input/Output Module

Novellus Systems 19-00130-00 Input/Output Module

Product Details Introduction

Novellus Systems 19-00130-00 Input/Output Module Product Application Fields

Mainly used in the process control system of Novellus semiconductor equipment, such as PECVD, ALD, PVD equipment.


Collect analog and digital signals from various sensors such as temperature, pressure, flow rate, and vacuum degree inside the device.


Control the actions of actuators such as valves, pumps, motors, and heaters to achieve process control.


Support automated operation of equipment to ensure stable and accurate process parameters.


Implement safety interlock and alarm functions for equipment to ensure operational safety and equipment protection.


Used for real-time monitoring of equipment status, assisting in equipment maintenance and fault diagnosis.


As a bridge between the control system and on-site equipment, it ensures reliable and stable signal transmission.


Suitable for centralized management of multi-channel and multi type signals in complex process environments.


Help improve equipment production efficiency and process repeatability, and meet the high-precision requirements of semiconductor manufacturing.


Widely used in wafer manufacturing, thin film deposition, and other semiconductor related processes.

Product imag

f0062124f6f79a18e01aae6405aa4040_1-250620110053N3.jpg

Related website links

ASEA 2668 180-291 slot control

ABB P8226 relay module

ABB P8480 Analog Output Module

Other website links

ABB RTU560 560CMD11 通信单元

GE EVPBDP0001 EVPBDP032 控制器

ASEA 57360001-HG电路板卡

PXI-8336GESPAC GESPIA-4 REV.B07KT97B GJR5253000R0262
PXI-8335 MXI-3PM630TC530 3BUR000101R1
PXI-8330 MXI-3Gespac MFI-1 GESMFI-1330103-00-07-10-02-00
PXI-8210Gespac GESOUT-3-9505 OUT-3B330730-080-01-00
PXI-8105Weidmuller RRDIO1507EA90-S GJR5251200R0101
PXI-7831RGESMDC-1 9728 MDC-1DSQC668 3HAC029157-001
PXI-7340IRDH275-435绝缘监视仪DSAI133 57120001-PS
PXI-6722PFSK164 3BSE021180R1YPH108B/SPC
PXI-6608Gespac GESCIO-3 CIO-1A3500/40-03-01           


Obtain the latest price of Novellus Systems 19-00130-00 Input/Output Module