Novellus Systems 19-00130-00 Input/Output Module
Product Details Introduction
Novellus Systems 19-00130-00 Input/Output Module Product Application Fields
Mainly used in the process control system of Novellus semiconductor equipment, such as PECVD, ALD, PVD equipment.
Collect analog and digital signals from various sensors such as temperature, pressure, flow rate, and vacuum degree inside the device.
Control the actions of actuators such as valves, pumps, motors, and heaters to achieve process control.
Support automated operation of equipment to ensure stable and accurate process parameters.
Implement safety interlock and alarm functions for equipment to ensure operational safety and equipment protection.
Used for real-time monitoring of equipment status, assisting in equipment maintenance and fault diagnosis.
As a bridge between the control system and on-site equipment, it ensures reliable and stable signal transmission.
Suitable for centralized management of multi-channel and multi type signals in complex process environments.
Help improve equipment production efficiency and process repeatability, and meet the high-precision requirements of semiconductor manufacturing.
Widely used in wafer manufacturing, thin film deposition, and other semiconductor related processes.
Product imag

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