Novellus Systems 03-10484-00 Interface Board

Novellus Systems 03-10484-00 Interface Board

Product Details Introduction

The Novellus Systems 03-10484-00 Interface Board is a specialized electronic module used in Novellus semiconductor equipment, mainly responsible for the transfer, conversion, and interface connection functions of control signals in the system. This interface board serves as a signal hub between multiple subsystems and plays a critical role in the process control flow.

1、 Basic Information

Project Content

Product Name: Interface Board

Product model 03-10484-00

Manufacturer Novellus Systems Inc. (now Lam Research)

Application Type Control Signal Bridge/Input/Output Interface Module

Common systems include Concept series, ALTUS series, INOVA series, and other CVD/PVD/ALD equipment

2、 Core functions

Function Category Function Description

Signal bridging transfers control signals and status signals between the main control system and peripherals

Multi channel I/O management connects multiple sensors, actuators, valve controllers, temperature control units, etc

Protocol/level conversion between different communication formats such as TTL, RS232, RS485, etc

Signal isolation prevents high voltage or interference signals from directly affecting the main control circuit

Some versions of the fault diagnosis interface come with onboard status indicator lights or test points for easy maintenance

3、 Typical application scenarios

This interface board mainly serves the control link layer in the following systems:

Process Gas Control Unit (MFC Control)

Pressure monitoring system

Heating/cooling platform control module

Vacuum pump control and feedback

Chamber valve actuator drive

Safety interlock and door lock system

Product imag

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