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  • Novellus Systems 03-137064-00 Interface Vector Board
  • Novellus Systems 03-137064-00 Interface Vector Board
  • Novellus Systems 03-137064-00 Interface Vector Board
Novellus Systems 03-137064-00 Interface Vector Board Novellus Systems 03-137064-00 Interface Vector Board Novellus Systems 03-137064-00 Interface Vector Board

Novellus Systems 03-137064-00 Interface Vector Board

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  • Delivery date: stock
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Novellus Systems 03-137064-00 Interface Vector Board

Product Details Introduction

The Novellus Systems 03-137064-00 Interface Vector Board is a high-density signal interface board specifically designed for Novellus semiconductor equipment. It is mainly used for the input/output connection and distribution of multi-channel signals in process control systems. This board is designed to distribute complex control signals (usually process related analog and digital signals) from the main control system to multiple submodules, or input them from multiple sensors into the control system.


1、 Basic Information

Project Content

Product model 03-137064-00

Product Name: Interface Vector Board

Manufacturer Novellus Systems Inc. (now part of Lam Research)

Category: High channel density signal interface board

Typical applications include I/O signal distribution, centralized wiring, and multi module signal bridging


2、 Core functions

Functional category description

High density signal access provides a large number of channel support, connecting multiple groups of sensors, actuators, or signal control lines

Signal vector allocation distributes signals from the main control to different equipment control nodes (such as valves, electric heating, pressure control, etc.) according to process logic

The centralized wiring platform serves as an interface transfer board for centralized wiring, convenient maintenance, expansion, or reconfiguration

Signal isolation protection board includes optocouplers and protection circuits to prevent the impact of static electricity, power surges, and other factors on the control system

Highly scalable design supports modular expansion and can connect multiple cables to the backplane or front panel


3、 Typical application devices

This board is commonly used in the following device platforms of Novellus:


Concept Two/Three series CVD systems


ALTUS ALD series metal deposition system


INOVA PVD system


Speed series (SACVD/HDPCVD)


Mainly installed in:


Main Control Cabinet


IO Interconnect Panel


Process chamber peripheral wiring board group (Chamber Harness Connection)

Product imag

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