KLA Tencor 710-658172-00 Controller Board

KLA Tencor 710-658172-00 Controller Board

Product Details Introduction

1、 Product identification

Model: 710-658172-00 (sometimes with REV H0 revision mark)

Function description: Y-Interpolator control board, used to control and interpolate precision movements related to the Y-axis

System application: commonly used in the main control card rack of wafer/mask inspection systems such as KLA Tencor 2132

2、 Function and Features

Y-axis interpolation control

Specially designed to handle precise interpolation operations on the Y-axis, ensuring high-precision stepping and positioning of the scanning system in the Y-axis direction

Installation environment

Inserted into the main control card slot of the system, it works in conjunction with the X-Interpolator, main processing board, and image processing board

Collaborative control system

Maintain synchronization with optical/electron beam scanning heads, platform drivers, and feedback sensors to ensure consistency and accuracy in the movement of the entire detection system

3、 Common application areas

Wafer/Mask Inspection System

Specially designed for KLA Tencor 2132 series equipment, common control card combinations in this system include:

X-Interpolator Control Board (710-658176-00 REV A0)

Y-Interpolator control board (710-658172-00 REV H0)

The main control board and auxiliary board work together to form a complete motion control system

High precision scanning platform

Can be applied to other scanning and detection devices that require precise Y-axis control, such as the motion control subsystem of Surfscan, Acrotec and other platforms

Product imag

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