Gasonics 853-4290-101 Load Lock Elevator Module

Gasonics 853-4290-101 Load Lock Elevator Module

Product Details Introduction

Product Name: Gasonics 853-4290-101 Load Lock Elevator Module

Functional positioning: Key actuator for load lock chamber wafer lifting control in semiconductor equipment

1、 Semiconductor wafer processing system

This module is widely used in Gasonics Aura plasma cleaning equipment, responsible for transferring wafers from atmospheric environment to vacuum environment, achieving wafer lifting and precise alignment.

Typical use:

Handling of loading and unloading materials before wafer cleaning, ashing, and debonding

Wafer transfer between load lock and processing chamber

Ensure high-precision wafer lifting operation under vacuum conditions

2、 Vacuum automatic transmission system

In plasma processing equipment, this module is often used in conjunction with robotic arms or transfer platforms to perform the function of vertical movement of wafers in negative pressure environments.

Applicable scenarios:

Loading and unloading docking in multi chamber processing system

Preparation for transportation before wafer pre-processing or post-processing

Connect and interface with AMHS system and front-end FOUP interface

3、 Cleaning steps before and after photolithography process

The load lock elevator module is used for surface treatment steps before and after the photolithography process to ensure the cleanliness of the wafer surface and avoid particle contamination.

Specific application:

Pre lithography degreasing and cleaning

Removal of residues after photolithography

Wafer transfer lifting between multi-layer processes

Product imag

Related website links

FOXBORO RH926GH Control Input Card

Fanuc A06B-6115-H006 servo drive

NI PCI4451 Data Acquisition Card

Other website links

ASEA 2668 180-179机器人控制器模块

ABB SM810K01 3BSE030928R1  CPU处理器模块

ABB RTU560 560CMD11 通信单元