Gasonics 810-2850-001 Motor Driver Module

Gasonics 810-2850-001 Motor Driver Module

Product Details Introduction

product name

Gasonics 810-2850-001 Motor Driver Module

Product application areas

Semiconductor Manufacturing Equipment

This module is mainly used in Gasonics' plasma asher and etching equipment to drive the motion control mechanism inside the vacuum chamber, such as the wafer arm, rotating platform, electric valve, and other components.

Wafer processing system in photolithography process

In the wafer cleaning and photoresist removal processes before and after photolithography, this driver module can control the motor actions related to rotation and lifting, ensuring the precision and stability of wafer transfer.

Vacuum system and conveying equipment

Used to control the servo or stepper motors in automatic doors, electric push rods, and exhaust devices that interface with vacuum chambers, to enhance automation and operate in conjunction with Gasonics pneumatic or electric valve modules.

Motion Control in Plasma Processing Equipment

During plasma etching or de gluing processes, this driver is used to control the motor to perform precise operations such as tray rotation, load lock mechanism opening and closing, and sample up and down movement.

Application of maintenance and replacement of old model equipment

Widely used for repairing, replacing, and upgrading equipment of Gasonics Aura 2000, Aura 3010, L3510, and other models, it is a compatible component of the original motor drive system.

Laboratory grade customized equipment and educational purposes

Some universities or research institutions retain this module as a teaching example or motion control unit when using retired semiconductor equipment for teaching or experimentation.

Product imag

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