FEI GIS 26833-E Controller

FEI GIS 26833-E Controller 

Product Introduction

The FEI GIS 26833-E controller is a gas injection control unit for electron microscopes, which accurately controls the timing and flow rate of process gas injection, and is suitable for processes related to focused ion beams and scanning electron microscopes. Its application areas are as follows:

1. FIB focused ion beam etching system

2. Scanning electron microscopy in-situ gas deposition platform

3. Semiconductor circuit repair and processing equipment

4. Chip Failure Analysis Electron Microscope Workstation

5. In situ reaction chamber for transmission electron microscopy

6. Micro nano processing equipment for MEMS devices

7. In situ gas-phase reaction observation platform for materials

8. Wafer micro area repair process device

9. Nano material gas-phase synthesis observation system

10. In situ processing platform for biological sample electron microscopy

11. In situ testing of gas-phase corrosion of metal materials

12. Optical Device Microstructure Modification Equipment

13. In situ catalytic experimental platform for scientific research electron microscopy

14. Power device defect repair system

15. Equipment for Micro Nano Characterization Laboratory in Universities

The FEI GIS 26833-E controller has precise gas injection timing, strong adaptability to vacuum conditions, and can be linked with the electron microscope host to stably complete coordinated control of gas supply, process reaction, and in-situ observation.

Product imag

ontroller Module

ATLAS TC-4000-P-PB-ES drive
HONEYWELL CC-PAIM01 Actuator module
HONEYWELL CC-PAIX02 Actuator module

Other website links

EMERSON KJ4110X1-BA1 模拟输出模块
prosoft 5202-DFNT-MCM4伺服冗余系统
Bently 3701/55监测器模块