FEI 1036162 plasma cleaner unit

FEI 1036162 plasma cleaner unit 

Product Introduction

The FEI 1036162 plasma cleaner unit is a vacuum plasma cleaning component used in conjunction with the FEI electron microscope for in-situ removal of carbon contamination inside the chamber.

Product Features

1. Compatible with FEI scanning electron microscopy and focused ion beam equipment, with stable communication linkage.

2. Low temperature plasma cleaning, without damaging the sample and optical components of the tube.

3. Work in a vacuum environment and adapt to the high vacuum chamber conditions of electron microscopes.

4. Equipped with timing control, the cleaning duration and gas flow rate can be set.

5. Modular integrated design for easy disassembly, replacement, and maintenance of equipment.

Application Areas

1. FEI SEM scanning electron microscope cavity decarbonization cleaning.

2. FEI FIB focused ion beam equipment pollution cleaning.

3. Pre treatment of semiconductor samples for electron microscopy observation.

4. Maintenance of material micro characterization equipment cavity.

5. Failure analysis laboratory electron microscope matching cleaning.

6. High resolution imaging preprocessing of nano samples.

7. Purification of geological mineral samples before observation.

8. Cleaning of the biological electron microscope sample chamber.

9. Spare parts for research electron microscopy equipment in universities.

10. Pollution control of precision vacuum analysis instruments.

The FEI 1036162 plasma cleaner unit can effectively eliminate carbon deposition in the tube, ensuring the clarity of electron microscopy imaging and equipment utilization rate.

Product imag

ontroller Module

1336-L4 Input module
1336F-MCB-SP2G input card
HONEYWELL CC-IP0101 gateway module

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