Varian L9121302000 Instrument Controller

Varian L9121302000 Instrument Controller

Product Introduction

Varian L9121302000 Instrument Controller

Product Features

Multi channel vacuum gauge signal acquisition supports multiple vacuum pressure sensor connections

Real time pressure value display can set pressure threshold to trigger interlocking action

Built in fault detection function monitors vacuum gauge disconnection and signal abnormalities

Support communication between analog output and device control system linkage

Rack mounted compact structure vacuum control cabinet easy to install and replace

Product application areas

Semiconductor vacuum chamber pressure monitoring system

Thin film deposition PVD CVD process equipment

Plasma etching vacuum pressure control unit

Laboratory high vacuum testing platform

Pressure monitoring of vacuum coating production line

Mass spectrometer vacuum system monitoring device

Pressure measurement and control equipment for vacuum heat treatment furnace

Wafer debonding and ashing vacuum equipment

Vacuum processing equipment for optical components

Vacuum leak detection system pressure acquisition unit

Product Specifications

Power supply specification: 120V to 240V AC power supply

Measurement type: Multi gauge vacuum pressure acquisition

Output signal analog signal output

The VARIAN L9121302000 instrument controller is a vacuum gauge control instrument used to collect pressure data from vacuum chambers, complete pressure monitoring and interlock control, and ensure stable operation of various vacuum processes.

Product imag

ontroller Module

 PM861 3BSE018129R1 Input characteristic card
 TC501V150 3BSC550038R3 Switching value module
 TC515V2 3BSE013284R1 Switching value card

Other website links

REXROTH CDB01.1C-ENS-ENS-NNN-MA1-NN-S-NN-FW控制单元
ALSTOM PIB101C工业级计算机板卡
 PPC322BE HIEE300900R1控制器模块