AMAT 0190-47186 Linear actuator assembly

AMAT 0190-47186 Linear actuator assembly

Product Introduction

AMAT 0190-47186 Linear actuator assembly

Product Features

High repeatability accuracy of ball screw transmission positioning

Built in position feedback sensor provides real-time displacement data feedback

Vacuum compatible structure adapted to semiconductor cavity environment

The integrated assembly design facilitates quick disassembly and replacement of the entire machine

Smooth operation with low jitter suitable for precise wafer displacement control

Product application areas

Semiconductor wafer processing equipment

Vacuum process chamber displacement mechanism

Wafer transfer lifting platform

Motion unit of thin film deposition equipment

Plasma etching machine execution component

Semiconductor cleaning equipment

Precision detection and alignment equipment

CMP chemical mechanical polishing equipment

Wafer debonding process equipment

Semiconductor Automation Platform System

Product Specifications

Drive type: servo motor drive

Transmission Structure Precision Ball Screw

The working environment supports vacuum working conditions

AMAT 0190-47186 linear actuator assembly is specially designed for semiconductor equipment to achieve high-precision linear motion, ensuring stable and reliable wafer process operation

Product imag

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Other website links

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