Seren 9600540003 RF power module

Seren 9600540003 RF power module

Product Introduction

Seren 9600540003 RF power module

Product Features

High output power regulation accuracy, low RF signal harmonics

Built in multiple protection mechanisms including overheat overload standing wave protection

Support pulse output mode for flexible control of process timing

Solid state amplification architecture has fast response speed and strong stability during operation

Compatible with digital and analog communication for easy integration and control on the upper computer

Product application areas

Semiconductor etching process equipment

Thin film deposition coating equipment

Plasma cleaning equipment

Photovoltaic cell processing equipment

Surface treatment of optical components

Laboratory Plasma Research Platform

Surface modification treatment of materials

Wafer debonding process system

Vacuum process supporting equipment

Precision electronic manufacturing production line

Product Specifications

Working frequency 13.56MHz

Continuous adjustable output power

Cooling method: Water cooling for heat dissipation

Seren 9600540003 RF power module outputs pure and stable RF energy, suitable for various plasma process equipment to meet the precision process requirements of high-end manufacturing

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Other website links

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