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Edwards PT59-ZS-Z00 Turbine Controller

Product Features

Accurately control the start stop acceleration deceleration of the turbo molecular pump to maintain stable vacuum in the chamber

Real time monitoring of pump speed, temperature, current status, and timely feedback of abnormal operation

Integrated multiple protections with overcurrent, overheating, overload fault shutdown alarm function

The standard communication interface can be connected to the semiconductor machine main control system for remote control

Compact integrated structure, easy to install for on-site maintenance and replacement of spare parts

Application Areas

Drive control of semiconductor etching machine turbine molecular pump

PVD coating chamber high vacuum molecular pump control

Start stop monitoring of CVD process chamber vacuum molecular pump

Control of Vacuum Pump Assembly for Wafer Load Lock Chamber

Replacement and maintenance of spare parts for semiconductor production line turbine controller

Refurbishment and renovation of chip equipment, vacuum matching control unit

Research and development of experimental vacuum equipment, molecular pump power supply control

Management of vacuum chamber pump group for ion implantation equipment

Control of high vacuum pumping system for vacuum coating equipment

Surface analysis instrument ultra-high vacuum pump drive unit

The model of the turbo controller used for driving and controlling the semiconductor vacuum system turbo molecular pump is Edwards PT59-ZS-Z00.

Product imag

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ontroller Module

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