Inficon 924-601-G1 gas analyzer

Inficon 924-601-G1 gas analyzer

 Introduction

Inficon 924-601-G1 gas analyzer

Product Features

Residual gas mass spectrometry detection can identify various process gas components and impurities

High sensitivity detection can detect trace gas leaks and chamber pollutants

Real time collection of voltage divider data to support endpoint judgment in semiconductor processes

The digital communication interface can be directly connected to the machine control system to upload data

Modular sensor components facilitate on-site maintenance and replacement, reducing downtime

Application Areas

Online monitoring of gas composition in semiconductor etching chamber process

Impurity detection in vacuum environment of PVD coating chamber

Analysis of Gas Composition in CVD Thin Film Deposition Process

Vacuum chamber leak detection and residual pollutant investigation

Replacement and maintenance of spare parts for gas analyzers in semiconductor production lines

Refurbishment and renovation of chip equipment with supporting gas monitoring unit

Research and development of experimental vacuum equipment for gas component detection

Identification of End Point Signal in Plasma Process

Monitoring of exhaust gas composition in wafer cleaning chamber

Ion implantation equipment vacuum chamber gas monitoring

The gas analyzer model for detecting gas components in semiconductor vacuum chambers is Inficon 924-601-G1.

Product imag

ontroller Module

 PFSK115 YM322001-EX Input channel card
 YPK110E Input channel card
 YPM102E YT204001-FL Switch serial card

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