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Teledyne Instruments 051550200 Ozone Analyzer

Product Features

Principle of UV absorption detection: Accurate and stable measurement of ozone concentration

Equipped with automatic zero calibration function to reduce long-term measurement drift

Supports digital analog signal output and can be connected to the main control system of the machine

Built in fault self checking and real-time feedback of abnormal gas sampling with alarm

Modular structure maintenance is simple and convenient for on-site replacement of consumables

Application Areas

Monitoring of gas concentration in semiconductor ozone cleaning process

Ozone content control in wafer surface oxidation treatment process

Online detection of ozone circuit for wet cleaning equipment

Replacement and maintenance of spare parts for semiconductor production line analyzers

Refurbishment and renovation of chip equipment with supporting gas monitoring unit

Research and development of experimental ozone process equipment for concentration detection

Real time monitoring of photoresist ozone stripping process

Output monitoring of high-purity ozone generation system

Ozone exhaust gas detection for exhaust gas treatment system

Ozone Monitoring in Semiconductor Cleanroom Environment

The ozone analyzer model used for online detection of ozone concentration in semiconductor processes is Teledyne Instruments 051550200.

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