Novellus Systems BB10-155942 bellows actuator

Novellus Systems BB10-155942 bellows actuator

 Introduction

Novellus Systems BB10-155942 bellows actuator, Novellus C2 series chamber lifting base bellows drive assembly, relies on metal bellows to achieve vacuum isolation and drive wafer base up and down displacement.

Product Features

1. The integrated metal corrugated tube structure maintains high vacuum in the chamber throughout the lifting and lowering movement, preventing air leakage

2. Built in servo screw drive, high resolution of lifting displacement, fine adjustment of base height

3. The corrugated pipe has the ability to stretch and buffer, which can absorb the small vibrations generated by the operation of the machine

4. Equipped with a position encoder for real-time feedback of the base height, closed-loop control ensures repeated positioning

5. Metal bellows are resistant to plasma corrosion and suitable for strong chemical environments in deposition processes

6. Built in hard limit travel prevents the base from exceeding its travel limit and hitting the upper cover plate of the cavity

7. The vacuum side is completely separated from the atmospheric side, and external transmission components will not contaminate the interior of the chamber

8. Standardization of flange interfaces eliminates the need for extensive disassembly of cavity structures during disassembly and assembly

9. Equipped with status monitoring, it can identify hidden dangers such as fatigue deformation and position deviation of corrugated pipes

10. The overall structure is resistant to temperature changes, and the displacement drift is very small when the cavity is heated and cooled

Application Areas

1. Novellus C2 series CVD thin film deposition chamber wafer base lifting unit

2. Wafer lifting and dropping actuator inside the vacuum process chamber

3. Semiconductor thin film growth station base height adjustment module

4. Vacuum chamber transmission isolation components for plasma deposition equipment

5.300mm wafer vacuum process chamber lifting execution system

The Novellus Systems BB10-155942 bellows actuator combines vacuum sealing and precision lifting, and is the core vacuum transmission spare part for carrying wafer bases inside CVD chambers.

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